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Jingyi Zheng · Study
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Jingyi Zheng
1 works
· latest 2020
· 1 institutions
cluster: provisional
ORCID 0000-0002-0393-0997
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Machine learning–driven in situ process monitoring with vibration frequency spectra for chemical mechanical planarization
2020 · 10 citations
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Machine learning–driven in situ process monitoring with vibration frequency spectra for chemical mechanical planarization
The International Journal of Advanced Manufacturing Technology
·
2020
·
4 authors
10
citations