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A.J. Walton · Study

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A.J. Walton

1 works· latest 1994· 1 institutionscluster: provisionalORCID 0000-0002-8110-2230

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The integration of simulation and response surface methodology for the optimization of IC processes1994 · 47 citations

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The integration of simulation and response surface methodology for the optimization of IC processes

IEEE Transactions on Semiconductor Manufacturing·1994·2 authors

47citations