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ArticlePerformance evaluation of photolithography cluster tools

James R. Morrison2006

Article2006

Performance evaluation of photolithography cluster tools

James R. Morrison · Donald P. Martin

32 citations·0/0 files stored·OR Spectrum

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Advanced Queuing Theory Analysis Scheduling and Optimization Algorithms Advanced Manufacturing and Logistics Optimization

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2019A queue-based aggregation approach for performance evaluation of a production system with an AMHS 2009Deterministic Flow Lines With Applications 2014The throughput rate of serial production lines with deterministic process times and random setups: Markovian models and applications to semiconductor manufacturing

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Year2006

Typearticle

Published2006-09-06

VenueOR Spectrum

ISSN-L0171-6468

Languageen

Citations32

Files0 public / 0

ShelfAdvanced Queuing Theory Analysis

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doi10.1007/s00291-006-0061-4

openalex_workW1486639976

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