Article1983

Reliability of high vacuum measurements

46 citations0/0 files storedJournal of Vacuum Science & Technology A Vacuum Surfaces and Films

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Scientific Measurement and Uncertainty Evaluation Advanced Measurement and Metrology Techniques Calibration and Measurement Techniques

Abstract

In order to allow the users of vacuum measurements to assess the reliability of their measurements, the current state of high-vacuum standards and gauging is reviewed. The discussion includes several types of high-vacuum primary standards currently in use, an assessment of probable errors for several types of hot filament ion gauges, user-controlled factors that may serve to increase the errors, and the information available to date on the performance of a commercially available molecular drag gauge. Examples are given of the introduction of additional errors by the improper application of vacuum gauges.

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2016Primary vacuometer based on an ultracold gas in a shallow optical dipole trap 2011Newly developed standard conductance element for in situ calibration of high vacuum gauges 2003Comparison of some metrological characteristics of hot and cold cathode ionisation gauges 1987The calibration of vacuum gauges 2009Stability tests of ionization gauges using two-stage flow-dividing system 1987Total pressure gauges

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