Article1988

The National Bureau of Standards primary high-vacuum standard

Charles Robert Tilford · Sharrill Dittmann · K. E. McCulloh

46 citations0/0 files storedJournal of Vacuum Science & Technology A Vacuum Surfaces and Films

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Scientific Measurement and Uncertainty Evaluation Advanced Measurement and Metrology Techniques Calibration and Measurement Techniques

Abstract

The theory, design, operating procedures, and estimated errors are discussed for an orifice-flow-type pressure standard currently in use at the National Bureau of Standards. This standard is used to define pressures between 10−7 and 10−1 Pa. Including the uncertainty of the flowmeter, the estimated total uncertainty varies from 2.6% at the highest pressures, to 1.4% at midrange, and 8.2% at the lowest pressures. Representative calibration results are presented for four different types of hot-cathode ionization gauges.

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2018Review Article: Quantum-based vacuum metrology at the National Institute of Standards and Technology 1999New approach to corrections for thermal transpiration effects in capacitance diaphragm gauges 1998NIST calibration services users guide 1998 1998Temperature corrections for the calibration of vacuum gauges 1993The uncertainties of calibration pressures at PTB 1993Behavior of commercial spinning rotor gages in the transition regime 2004The effect of ambient temperature on the sensitivity of hot-cathode ionization gauges 2012Long-term stability of metal-envelope enclosed Bayard–Alpert ionization gauges

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