Spinning rotor viscosity gauge: A transfer standard for the laboratory or an accurate gauge for vacuum process control

Abstract

A new gauge has been developed that appears to be the ideal tool for measuring low pressures in both research and industrial vacuum processes where reliability and accuracy of measurement are of importance. In particular, it will be emphasized that the spinning rotor viscosity gauge (licensed by Kernforschungsanlage Jülich GmbH, Germany) is in fact a fundamental vacuum gauge because its ’’sensitivity’’ depends only on the mass and diameter of the ball. These quantities do not change and can be determined accurately by well-known fundamental methods. The new gauge excels the common vacuum gauges by the following features: long-term stability, instantly operational; high accuracy and repeatability; no hysteresis; no temperature stabilizing required. The new gauge is rugged and will perform well under both working and transfer conditions. The spinning rotor viscosity guage has inherent long-term reproducibility that will serve well should it be used as a transfer standard. The simplicity and accuracy of operation should offer applications in the area of process control.

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