Piston Manometer as an Absolute Standard for Vacuum-Gauge Calibration

Abstract

Total pressure in a calibration volume is determined by measuring the force on a thin circular disk, of accurately known area, that is freely suspended in a hole in the container wall, so that the disk is substantially flush with the wall. The disk almost fills the hole, so that there is a narrow annular gap. A continuous flow of calibrating gas, injected into the container in order to maintain a desired pressure, passes through the annular gap to a diffusion pump. The ratio of pressures on the two faces of the disk is of the order of 100:1, so that downstream pressure need be known only nominally in order to deduce the upstream pressure. Force on the disk is measured by a balance that is calibrated in situ with dead weights. In one arrangement, pressures in the range of 10–500 μTorr were measured with an estimated probable error of (1μTorr+1%).

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