A new method for the calibration of the vertical scale of a stylus profilometer using multiple delta-layer films

Abstract

A new method for the vertical scale calibration in step height measurement has been established using a multiple delta-layer film. The vertical scale of a stylus profilometer can be traceable to the length unit by the certified film thickness in a multiple delta-layer. A Si/Ge multiple delta-layer film with six Si layers separated by Ge delta-layers was developed. The total thickness and delta-layer spacing were certified by high resolution transmission electron microscopy. Six craters with different depth were formed on the Si/Ge multiple delta-layer film by ion beam sputtering via SIMS depth profiling. The depths of the craters can be determined from the certified depth of the delta-layer and direct measurements using a stylus profilometer calibrated by a step-height standard. The vertical scale of a stylus profilometer can be calibrated by the slope and the offset of the measured crater depth fitted as a function of the certified nominal thickness.

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