A system for vacuum gauge calibration using the comparison technique

Abstract

A system for calibrating vacuum gauges in the range 10−4 to 102 Pa with an estimated uncertainty of ±8% is described. The factors affecting the design of the calibration vessel are discussed and the performance of the system enumerated. The reference gauges used are triode ionization gauges and a capacitance manometer. The reproducibilities of the reference gauges are estimated together with the other factors which contribute to the total uncertainty attached to a calibration performed on the system.

Cite this work

No public copy is stored for this record, so only the metadata is cited.

Stored only when both papers are in the corpus — 15 citations exist upstream.