A comparative study of the monitoring performance for weighted control charts

Abstract

Statistical process control (SPC) is the method that monitors process quality characteristics. Through control charts, one can detect whether the present process malfunction. However, some annoyances may arise while the engineers need to choose appropriately control chart under different levels of process variation. The Shewhart, cumulative sum (CUSUM) and exponentially weighted moving average (EWMA) control charts have been widely used for monitoring semiconductor manufacturing processes. Generally weighted moving average (GWMA) control chart is a new method of SPC, which was proposed by Sheu and Lin (2003). The main objective of this research is using step-by-step procedures to present a comparative study of the monitoring performance for Shewhart, CUSUM, EWMA and GWMA control charts. According to a specified in-control average run length (ARL), we determine the parameters of each control chart based on the Monte Carlo numerical simulation. The setting parameters in each control chart sre displayed and tabulated. While the process means or the process standard deviations are changing in different levels, the performance of each weighted control chart can be then compared by using the ARL. A rule of thumb for selecting better control schemes is provided as a truthfully reference to help engineers in choosing the more appropriate control charts immediately when the assignable causes occurred.

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