Mass Spectrometric Determination of Ionization Pressure Gauge Sensitivities

Abstract

A new method was devised for calibrating ion gages for measurements of pressures of gases other than N/sub 2/. A mass spectrometer signal is obtained as a function of the apparent pressure in the ion gage. A high-pressure mixture of N/sub 2/ and some other gas of known composition is allowed to leak into the system to establish a steady-state pressure, and the resulting mass spectrometer is used to compute the sensitivity of the gage to the second gas. The sensitivities to Ar, CO, O/sub 2/, and NO were measured relative to N/sub 2/ and compared with other literature values. (D.L.C.)

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