High-accuracy gas flow dilutor using mass flow controllers with binary weighted flows

Abstract

A high-accuracy gas flow dilutor has been developed using mass flow controllers operating at flow rates ordered in terms of factors of two. It uses a novel self-referencing calibration procedure to generate variable dilutions with a typical accuracy of ±0.4%. There is no requirement for calibration to any external standard of flow. A detailed analysis of the uncertainty of configurations giving constant total gas and constant complementary gas flow is presented. Applications of the dilutor to the analysis of standard gas mixtures and to testing the linearity of gas analysers are demonstrated.

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