Design and evaluation of a primary high-vacuum standard

Abstract

Calibration pressures in the high- and ultrahigh-vacuum range are conveniently generated by the expansion of gas in a continuous flow. The design and the performance of a new continuous (often called dynamic) expansion standard and a partly computer-controlled flowmeter are reported. Pressures are generated from 10−6 to 10−2 Pa with uncertainties (2σ, linear addition of individual uncertainties) between 1% and 4%. A comparison with a static expansion standard was carried out and showed good conformity between the two standards.

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