Fast Accurate McLeod Gauge System

Abstract

The use of an orifice and a secondary mercury source near it as means for reducing the trap pumping error of the McLeod gauge is discussed. With the proper utilization of an orifice, trap pumping is not a serious hindrance to the use of the McLeod gauge as a primary pressure standard. Accuracy better than 1% with a time constant less than 30 sec can be achieved using a conventional McLeod gauge. Experiments that directly demonstrated a reduction of the trap pumping error gave good agreement with the theoretically expected reduction.

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