Article1977

The calibration of vacuum gauges

63 citations0/0 files storedJournal of Physics E Scientific Instruments

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Scientific Measurement and Uncertainty Evaluation Advanced Measurement and Metrology Techniques Calibration and Measurement Techniques

Abstract

This review covers the different techniques that are available for the calibration of vacuum gauges, dealing with both calibration by comparison with an absolute gauge and calibration on a primary standard which generates known low pressures. The various sources of systematic uncertainty in both the series expansion and the orifice flow methods are examined and quantified. The performances of some calibration systems are compared. Parts of this review also cover the possible use of fixed points in vacuum metrology, reference gauges and the intercomparison of standards between laboratories.

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1999New, fully automated, primary standard for generating vacuum pressures between 10 10Pa and 3 10 2Pa with respect to residual pressure 1990Pressures in the high and medium vacuum range generated by a series expansion standard 1988Primary pressure measurements down to 10−6 Pa 1989Intercomparison of Nine National High-vacuum Standards under the Auspices of the Bureau International des Poids et Mesures 1979An interferometric oil micromanometer 1978Vacuum gauge calibration by the orifice flow method in the pressure range 10−4-10 pa 1979Measurement of ultra high vacuum Part I. Total pressure measurements 2002High-accuracy calibration in the vacuum range 0.3 Pa to 4000 Pa using the primary standard of static gas expansion

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