Article2011

Stochastic Modeling of the Pull-In Voltage in a MEMS Beam Structure

Francisc Bölöni · Abdelkader Bénabou · A. Tounzi

10 citations0/0 files storedIEEE Transactions on Magnetics

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Probabilistic and Robust Engineering Design Scientific Measurement and Uncertainty Evaluation Advanced MEMS and NEMS Technologies

Abstract

This paper deals with a stochastic approach to model the pull-in voltage in a microelectromechanical system (MEMS) beam structure. Two nonintrusive stochastic techniques are used: a sampling method, based on Monte-Carlo simulations and a polynomial chaos expansion (PCE) approach. The deterministic model solves an electro-mechanical problem using a coupled 2-D finite element (FE) electrostatic and Euler-Bernoulli beam equation mechanical model. The influence on the pull-in voltage of three parameters subjected to uncertainty (material properties and shape) was investigated. Also, the advantage of the PCE method, compared to Monte-Carlo sampling method, was emphasized.

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References

2003Modeling uncertainty in flow simulations via generalized polynomial chaos 2009A domain adaptive stochastic collocation approach for analysis of MEMS under uncertainties 20073-D Spectral Stochastic Finite Element Method in Electromagnetism

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