Statistical control of VLSI fabrication processes. II. A software system

Abstract

For pt.I see ibid., vol.1, no.2, p.62-71, 1988. The algorithms used to implement the CMU-CAM statistical control system for VLSI integrated circuit fabrication are presented. The CMU-CAM system performs three major operations: modeling; quality control; and feed-forward control. In order to increase the efficiency of modeling and control, the problem is decomposed using statistical factorization techniques. Algorithms for process modeling and algorithms used in quality control and feed-forward control are described. The CMU-CAM system performs profit maximization through statistical process control. Its capabilities are illustrated by a number of computational examples.>

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