Microforce and Instrumented Indentation Research at the National Institute of Standards and Technology, Gaithersburg, MD | NIST

Abstract

This paper provides an overview of recent efforts at the National Institute of Standards and Technology (NIST) to develop metrology and standards to support general users of instrumented indentation and scan-probe devices. Research directed towards a primary realization of force in the regime below 10 μN, development and characterization of novel compact microforce sensors, scan-probe force calibration, and standardization of instrumented indentation practices and calibration procedures is included. Descriptions of various laboratories and facilities are also highlighted.

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