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In this paper, we separate the integrated (spot) volatility of an individual Itô process into integrated (spot) systematic and idiosyncratic volatilities, and estimate them by aggregation of local factor analysis (localization) with large-dimensional high-frequency data. We show that, when both the sampling frequency $n$ and the dimensionality $p$ go to infinity and $p\geq C\sqrt{n}$ for some constant $C$, our estimators of High dimensional Itô process; common driving process; specific driving process, integrated High dimensional Itô process, common driving process, specific driving process, systematic and idiosyncratic volatilities are $\sqrt{n}$ ($n^{1/4}$ for spot estimates) consistent, the best rate achieved in estimating the integrated (spot) volatility which is readily identified even with univariate high-frequency data. However, when $Cn^{1/4}\leq p
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