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A.L.P. Chen · Study
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A.L.P. Chen
1 works
· latest 2001
· 1 institutions
cluster: provisional
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Age-based double EWMA controller and its application to CMP processes
2001 · 128 citations
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Age-based double EWMA controller and its application to CMP processes
IEEE Transactions on Semiconductor Manufacturing
·
2001
·
2 authors
128
citations