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Richard L. Guldi · Study
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Richard L. Guldi
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· latest 1989
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cluster: provisional
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Process optimization tweaking tool (POTT) and its application in controlling oxidation thickness
1989 · 20 citations
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Process optimization tweaking tool (POTT) and its application in controlling oxidation thickness
IEEE Transactions on Semiconductor Manufacturing
·
1989
·
5 authors
20
citations