Process optimization tweaking tool (POTT) and its application in controlling oxidation thickness

Richard L. Guldi · C.D. Jenkins · G.M. Oamminga · T.A. Baum · Thomas A Foster

20 citations0/0 files storedIEEE Transactions on Semiconductor Manufacturing

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Advanced Statistical Process Monitoring Management and Optimization Techniques Fault Detection and Control Systems

Abstract

This computer utility extracts process data from a manufacturing statistical process control database, calculates oxidation times appropriate to recenter the thickness to the desired process mean, and inserts the values of new oxidation times directly into furnace oxidation recipes resident in the main BTU host computer so that production furnace recipes downloaded to the furnace controller automatically contain the new oxidation times. The major attributes of POTT are summarized and its application in controlling oxidation thickness for silicon integrated-circuit fabrication as well as results obtained using two different retargeting strategies are described.>

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2009Quality control of the injection molding process using an EWMA predictor and minimum–variance controller 2003In-line statistical process control and feedback for VLSI integrated circuit manufacturing 1990In-line statistical process control and feedback for VLSI integrated circuit manufacturing

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