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A precision gas flowmeter for vacuum metrology · Study

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ArticleA precision gas flowmeter for vacuum metrology

Karl Jousten1993

Article1993

A precision gas flowmeter for vacuum metrology

Karl Jousten · Günter Messer · D Wandrey

49 citations·0/0 files stored·Vacuum

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Scientific Measurement and Uncertainty Evaluation Advanced Measurement and Metrology Techniques Flow Measurement and Analysis

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References

1987Low-range flowmeters for use with vacuum and leak standards

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2002A new fully automated gas flowmeter at the PTB for flow rates between 10-13mol/s and 10-6mol/s 1998Temperature corrections for the calibration of vacuum gauges 1993The uncertainties of calibration pressures at PTB 2006Improved determination of the gas flow rate for UHV and leak metrology with laser refractometry 2022Precise quantum measurement of vacuum with cold atoms

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2017Development of a new UHV/XHV pressure standard (cold atom vacuum standard)article · 1 shared reference 2018Review Article: Quantum-based vacuum metrology at the National Institute of Standards and Technologyarticle · 1 shared reference 1998NIST calibration services users guide 1998report · 1 shared reference 1998Temperature corrections for the calibration of vacuum gaugesarticle · 1 shared reference 2011Leak rate metrology for the society and industryarticle · 1 shared reference 2009A primary standard for the calibration of sniffer test leak devicesarticle · 1 shared reference

Details

Year1993

Typearticle

Published1993-02-01

VenueVacuum

ISSN-L0042-207X

Languageen

Citations49

Files0 public / 0

ShelfScientific Measurement and Uncertainty Evaluation

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doi10.1016/0042-207x(93)90362-e

openalex_workW1995115459

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