A new fully automated gas flowmeter at the PTB for flow rates between 10-13mol/s and 10-6mol/s

Abstract

For applications in vacuum metrology, gas flowmeters have to deliver pure gas flows with well-known molar flow rates of low (< 10 -6 mol/s) and very low values. Accurate flowmeters are used to generate pressures in continuous expansion systems, to measure leak rates, and to measure pumping speeds of ultrahigh-vacuum pumps. At the Physikalisch-Technische Bundesanstalt (PTB) a new, fully automated, all-metal flowmeter was commissioned for use with a continuous expansion system in the pressure range 10 -10 Pa to 3 × 10 -2 Pa. It delivers gas flows with molar flow rates between 4 × 10 -13 mol/s and 10 -6 mol/s (throughputs 10 -6 Pa l/s to 3 Pa l/s at 23 °C) with relative standard uncertainties ranging from 1.45% at 4 × 10 -13 mol/s down to 0.14% at 10 -6 mol/s.

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