SZodixStudyAcademic Library
ShelvesOpen access
Study · an open academic library·Metadata from OpenAlex (CC0)·Shelves·OpenAlex metadata, de-duplicated
Multiple-input dual-output adjustment scheme for semiconductor manufacturing processes using a dynamic dual-response approach
16 references·0 citing·31 second hop
Multiple-input dual-output adjustment scheme for semiconductor manufacturing processes using a dynamic dual-response approach (2006)Multiple-input dual-output adjustment sch…Statistical process adjustment for quality control (2002)Statistical process adjustmen…Run-to-Run Control in Semiconductor Manufacturing (2002)Run-to-Run Control in Semicon…A multivariate double EWMA process adjustment scheme for drifting processes (2002)A multivariate double EWMA pr…Some Properties of EWMA Feedback Quality Adjustment Schemes for Drifting Disturbances (2001)Some Properties of EWMA Feedb…A Generalized Global Optimization Algorithm for Dual Response Systems (2000)A Generalized Global Optimiza…Long run and transient analysis of a double EWMA feedback controller (1999)Long run and transient analys…The Computation of Global Optima in Dual Response Systems (1997)The Computation of Global Opt…Run-to-Run Process Control: Literature Review and Extensions (1997)Run-to-Run Process Control: L…Response Surfaces: Designs and Analyses (1997)Response Surfaces: Designs an…Response Surface Methodology: Process and Product Optimization Using Designed Experiments (1996)Response Surface Methodology:…Run by run process control: combining SPC and feedback control (1995)Run by run process control: c…Dual Response Surface Optimization (1995)Dual Response Surface Optimiz…Stability and Sensitivity of an EWMA Controller (1993)Stability and Sensitivity of …A Nonlinear Programming Solution to the Dual Response Problem (1993)A Nonlinear Programming Solut…Response Surface Techniques for Dual Response Systems (1973)Response Surface Techniques f…"Ridge Analysis" of Response Surfaces (1963)"Ridge Analysis" of Response …The Exponentially Weighted Moving Average (1986)Exponentially Weighted Moving Average Control Schemes: Properties and Enhancements (1990)On the Experimental Attainment of Optimum Conditions (1951)Time Series Analysis: Forecasting and Control (1977)Empirical Model Building and Response Surfaces (1988)Age-based double EWMA controller and its application to CMP processes (2001)Empirical Model-Building and Response Surfaces. (1988)Combining Taguchi and Response Surface Philosophies: A Dual Response Approach (1990)Dual Response Surface Optimization: A Fuzzy Modeling Approach (1998)Response Surface Methodology—Current Status and Future Directions (1999)Robust Parameter Design: A Review (2003)Design and Analysis of Industrial Experiments. (1955)Response Surface Methodology: 1966–l988 (1989)On the Experimental Attainment of Optimum Conditions (1992)12 Multiresponse surface methodology (1996)Statistics as a Catalyst to Learning by Scientific Method Part I—An Example (1999)Dual Response Optimization via Direct Function Minimization (1996)Response Surface Methodology (1996)Statistics for Experimenters (1979)Design and Analysis of Experiments (1998)Modeling and optimization I: Usability of response surface methodology (2006)Response surface methodology (2010)Statistics for experimenters. An introduction to design, data analysis, and model building. (1978)A new look at the response surface approach for reliability analysis (1993)Latin hypercube sampling and the propagation of uncertainty in analyses of complex systems (2003)Response Surface Methodology: A Retrospective and Literature Survey (2004)Out of the Crisis (1982)SPC Methods for Quality Improvement (1999)An Overview of the Shainin System™ for Quality Improvement (2007)On the use of principal component analysis to identify systematic patterns in roundness profiles (2007)Statistical control charts as a support tool for the management of livestock production (2010)
this work references cited by second hop

References

  • 1996Response Surface Methodology: Process and Product Optimization Using Designed Experiments9,540 cited
  • 1997Response Surfaces: Designs and Analyses1,520 cited
  • 1995Dual Response Surface Optimization392 cited
  • 1995Run by run process control: combining SPC and feedback control325 cited
  • 1993A Nonlinear Programming Solution to the Dual Response Problem300 cited
  • 1973Response Surface Techniques for Dual Response Systems267 cited
  • 1993Stability and Sensitivity of an EWMA Controller230 cited
  • 1997Run-to-Run Process Control: Literature Review and Extensions222 cited
  • 2002Statistical process adjustment for quality control125 cited
  • 1963"Ridge Analysis" of Response Surfaces121 cited
  • 2002Run-to-Run Control in Semiconductor Manufacturing99 cited
  • 1999Long run and transient analysis of a double EWMA feedback controller83 cited
  • 2002A multivariate double EWMA process adjustment scheme for drifting processes77 cited
  • 2001Some Properties of EWMA Feedback Quality Adjustment Schemes for Drifting Disturbances57 cited
  • 2000A Generalized Global Optimization Algorithm for Dual Response Systems48 cited

Only edges whose both ends are imported exist here. Widen the year window, or show the whole map. Back to the work

1997
The Computation of Global Optima in Dual Response Systems
41 cited

Cited by

No citing works inside the corpus for this window.