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This study proposes an Alignment Model of IT Governance and Performance Measurement based on Framework CobiT 5, which is conducted by identifying Business Goals, IT Goals, IT Process and Framework Alignment. The research results indicate that the education quality standard of Dian Nuswantoro University which fulfill Regulation of Ministry of Research, Technology and Higher Education No. 44 of 2015 is 42% and the remaining 58% has not fulfilled it. Model of IT Governance as a University Quality Assurance System with ISO/IEC 38500: 2008 and Process Reference Model CobiT 5 frameworks could be performed by aligning Dian Nuswantoro University's goals to the Process Reference Model CobiT 5 and adjusted with the IT governance principles based on ISO/IEC 38500 framework. However, the capability level of IT processes is mostly at level 1, showing that the IT processes have indeed been implemented and some of them have reached level 2, indicating that the processes have been implemented and managed. Meanwhile, it is expected that the capability level could mostly be at level 4, an indication that the IT processes should be implemented, managed and standardized and a performance measurement should be performed.
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