Statistical process adjustment: a brief retrospective, current status, and some opportunities for further work

Enrique Del Castillo

23 citations0/0 files storedStatistica Neerlandica

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Advanced Statistical Process Monitoring Management and Optimization Techniques Fault Detection and Control Systems

Abstract

Industrial statisticians frequently face problems in their practice where adjustment of a manufacturing process is necessary. In this paper, a view of the origins and recent work in the area of statistical process adjustment (SPA) is provided. A discussion of some topics open for further research is also given including new problems in semiconductor manufacturing process control. The goal of the paper is to help display the SPA field as a research area with its own identity and content, and promote further interest in its development and application in the industry.

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References

1959Control Charts and Stochastic Processes 1995Run by run process control: combining SPC and feedback control 1993Stability and Sensitivity of an EWMA Controller 1992Algorithmic Statistical Process Control: Concepts and an Application 1993Algorithmic Statistical Process Control: An Elaboration 1999Long run and transient analysis of a double EWMA feedback controller 1992An SPC Model for Short Production Runs: Minimizing Expected Cost 1999Integrated design of run-to-run PID controller and SPC monitoring for process disturbance rejection

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