Statistical Process Control for Semiconductor Manufacturing Processes

Abstract

This paper considers statistical process control (SPC) for the semiconductor manufacuturing industry, where automatic process adjustment and process maintenance are widely used. However, SPC has been developed in parts industry an, thus, application of SPC to chemical processes such as those in the semiconductor manufacuturinghas not been systematically investigated Two case studies are presented; one is an example for process adjustment and the other is an example for process maintenance. Either of them is based on control charts and it is discussed how to take into account process autocorrelation.

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