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Stability and Sensitivity of an EWMA Controller

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References

1990Exponentially Weighted Moving Average Control Schemes: Properties and Enhancements1,939 cited
1986The Exponentially Weighted Moving Average1,146 cited

Cited by

1997Run-to-Run Process Control: Literature Review and Extensions222 cited
1999Long run and transient analysis of a double EWMA feedback controller83 cited
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2003A study of variable ewma controller64 cited
1997A self-tuning EWMA controller utilizing artificial neural network function approximation techniques62 cited
2001Some Properties of EWMA Feedback Quality Adjustment Schemes for Drifting Disturbances57 cited
2013Overlay Error Compensation Using Advanced Process Control With Dynamically Adjusted Proportional-Integral R2R Controller51 cited
2002The dynamic T 2 chart for monitoring feedback-controlled processes41 cited
2002A study on a multivariate EWMA controller40 cited
2002SISO run-to-run feedback controller using triple EWMA smoothing for semiconductor manufacturing processes39 cited
1995Quality control charting for the analytical laboratory. Part 1. Univariate methods. A review37 cited
1998A probabilistic approach to run-to-run control35 cited

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2002Statistical design of double EWMA controller34 cited

2007Run-to-Run Process Adjustment Using Categorical Observations33 cited

2023Reinforcement learning for process control with application in semiconductor manufacturing27 cited

2009The optimal drift-compensatory and fault tolerant approach for mixed-product run-to-run control26 cited