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The optimal drift-compensatory and fault tolerant approach for mixed-product run-to-run control

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References

2002Introduction to Time Series and Forecasting3,913 cited
1995Run by run process control: combining SPC and feedback control325 cited
1993Stability and Sensitivity of an EWMA Controller230 cited
2002Run-to-Run Control in Semiconductor Manufacturing99 cited
1999Long run and transient analysis of a double EWMA feedback controller83 cited
2002Statistical design of double EWMA controller34 cited

Cited by

2010An EWMA Algorithm With a Cycled Resetting (CR) Discount Factor for Drift and Fault of High-Mix Run-to-Run Control23 cited
2010Cycle forecasting EWMA (CF-EWMA) approach for drift and fault in mixed-product run-to-run process21 cited

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