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Cycle forecasting EWMA (CF-EWMA) approach for drift and fault in mixed-product run-to-run process
8 references·0 citing·23 second hop
Cycle forecasting EWMA (CF-EWMA) approach for drift and fault in mixed-product run-to-run process (2010)Cycle forecasting EWMA (CF-EWMA) approach…An EWMA Algorithm With a Cycled Resetting (CR) Discount Factor for Drift and Fault of High-Mix Run-to-Run Control (2010)An EWMA Algorithm With a Cycl…The optimal drift-compensatory and fault tolerant approach for mixed-product run-to-run control (2009)The optimal drift-compensator…A General Harmonic Rule Controller for Run-to-Run Process Control (2009)A General Harmonic Rule Contr…Variable EWMA run-to-run controller for drifted processes (2006)Variable EWMA run-to-run cont…A study of variable ewma controller (2003)A study of variable ewma cont…Run-to-Run Control in Semiconductor Manufacturing (2002)Run-to-Run Control in Semicon…Run by run process control: combining SPC and feedback control (1995)Run by run process control: c…Stability and Sensitivity of an EWMA Controller (1993)Stability and Sensitivity of …The Exponentially Weighted Moving Average (1986)Exponentially Weighted Moving Average Control Schemes: Properties and Enhancements (1990)Run-to-Run Process Control: Literature Review and Extensions (1997)Long run and transient analysis of a double EWMA feedback controller (1999)A multivariate double EWMA process adjustment scheme for drifting processes (2002)Introduction to Time Series and Forecasting (2002)Time Series Analysis: Forecasting and Control (1977)Out of the Crisis (1982)SPC Methods for Quality Improvement (1999)Age-based double EWMA controller and its application to CMP processes (2001)Time Series Analysis Forecasting and Control. (1971)Time Series Analysis: Forecasting and Control (1977)Statistical control by monitoring and feedback adjustment (1997)Run-to-Run Process Adjustment Using Categorical Observations (2007)Overlay Error Compensation Using Advanced Process Control With Dynamically Adjusted Proportional-Integral R2R Controller (2013)Reinforcement learning for process control with application in semiconductor manufacturing (2023)Time Series Analysis Forecasting and Control (1971)Online parameter estimation and run-to-run process adjustment using categorical observations (2010)A batch-based run-to-run process control scheme for semiconductor manufacturing (2013)A Run-to-Run Profile Control Algorithm for Improving the Flatness of Nano-Scale Products (2013)Statistical Control by Monitoring and Feedback Adjustment (1998)A Bayesian framework for online parameter estimation and process adjustment using categorical observations (2011)Run-to-run control of batch production process in manufacturing systems based on online measurement (2020)
this work references cited by second hop

References

  • 1995Run by run process control: combining SPC and feedback control325 cited
  • 1993Stability and Sensitivity of an EWMA Controller230 cited
  • 2002Run-to-Run Control in Semiconductor Manufacturing99 cited
  • 2003A study of variable ewma controller64 cited
  • 2009The optimal drift-compensatory and fault tolerant approach for mixed-product run-to-run control26 cited
  • 2006Variable EWMA run-to-run controller for drifted processes26 cited
  • 2010An EWMA Algorithm With a Cycled Resetting (CR) Discount Factor for Drift and Fault of High-Mix Run-to-Run Control23 cited
  • 2009A General Harmonic Rule Controller for Run-to-Run Process Control21 cited

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