Two-stage flow-dividing system for the calibration of vacuum gauges

Abstract

A two-stage flow-dividing system was developed for calibrating an ionization gauge (IG) and residual gas analyzer (RGA). This system generates a stable high and ultrahigh vacuum from 8×10−3to2×10−7Pa by adjusting the pressure in the first chamber using N2, Ar, He, and H2. The calibration pressure in the third chamber is calculated from the pressure in the second chamber using their linear relation in molecular flow. The uncertainty of the generated pressure was comparable to or several times larger than that of the continuous-expansion system. However, this system has a simple configuration and is easy to operate compared with the continuous-expansion system because it has no moving parts. Results of the calibration of IG and RGA showed that the two-stage flow-dividing system is useful for a routine calibration of practical vacuum gauges in high and ultrahigh vacuum.

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