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Two-stage flow-dividing system for the calibration of vacuum gauges

5 references·3 citing·22 second hop

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References

1999New, fully automated, primary standard for generating vacuum pressures between 10 10Pa and 3 10 2Pa with respect to residual pressure57 cited
1988The National Bureau of Standards primary high-vacuum standard46 cited
1988Primary pressure measurements down to 10−6 Pa34 cited
2003Comparison of some metrological characteristics of hot and cold cathode ionisation gauges29 cited
2006Measurement uncertainties for vacuum standards at Korea Research Institute of Standards and Science21 cited

Cited by

2011Calibration of ultrahigh vacuum gauge from 10−9 Pa to 10−5 Pa by the two-stage flow-dividing system13 cited
2009Stability tests of ionization gauges using two-stage flow-dividing system12 cited
2020A UHV standard with option to be used as partial pressure standard8 cited

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