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Run by run process control: combining SPC and feedback control
7 references·16 citing·29 second hop
Run by run process control: combining SPC and feedback control (1995)Run by run process control: combining SPC…Statistical Process Monitoring and Feedback Adjustment: A Discussion (1992)Statistical Process Monitorin…[Statistical Process Monitoring and Feedback Adjustment]: Discussion (1992)[Statistical Process Monitori…Quality Engineering in Production Systems (1990)Quality Engineering in Produc…Exponentially Weighted Moving Average Control Schemes: Properties and Enhancements (1990)Exponentially Weighted Moving…The Exponentially Weighted Moving Average (1986)The Exponentially Weighted Mo…Out of the Crisis (1982)Out of the CrisisTime Series Analysis: Forecasting and Control (1977)Time Series Analysis: Forecas…Overlay Error Compensation Using Advanced Process Control With Dynamically Adjusted Proportional-Integral R2R Controller (2013)Overlay Error Compensation Us…A Literature Review on Sampling Techniques in Semiconductor Manufacturing (2013)A Literature Review on Sampli…A new monitoring design for uni-variate statistical quality control charts (2009)A new monitoring design for u…The worst ill-conditioned silicon wafer slicing machine detected by using grey relational analysis (2006)The worst ill-conditioned sil…A Unifying View of Some Process Adjustment Methods (2003)A Unifying View of Some Proce…A study on a multivariate EWMA controller (2002)A study on a multivariate EWM…A multivariate double EWMA process adjustment scheme for drifting processes (2002)A multivariate double EWMA pr…Some Properties of EWMA Feedback Quality Adjustment Schemes for Drifting Disturbances (2001)Some Properties of EWMA Feedb…Age-based double EWMA controller and its application to CMP processes (2001)Age-based double EWMA control…SPC Methods for Quality Improvement (1999)SPC Methods for Quality Impro…Long run and transient analysis of a double EWMA feedback controller (1999)Long run and transient analys…Integrated design of run-to-run PID controller and SPC monitoring for process disturbance rejection (1999)Integrated design of run-to-r…Combining SPC and EPC in a Hybrid Industry (1998)Combining SPC and EPC in a Hy…Run-to-Run Process Control: Literature Review and Extensions (1997)Run-to-Run Process Control: L…A self-tuning EWMA controller utilizing artificial neural network function approximation techniques (1997)A self-tuning EWMA controller…Modeling, optimization and control of spatial uniformity in manufacturing processes (1993)Modeling, optimization and co…On the Experimental Attainment of Optimum Conditions (1951)Empirical Model Building and Response Surfaces (1988)Statistical control by monitoring and feedback adjustment (1997)Application of statistical process control charts to monitor changes in animal production systems1 (2010)A spatial rank‐based multivariate EWMA control chart (2012)A Distribution-Free Multivariate Control Chart (2015)Optimal Properties of Exponentially Weighted Forecasts (1960)A Multivariate Exponentially Weighted Moving Average Control Chart (1992)A review of multivariate control charts (1995)Research Issues and Ideas in Statistical Process Control (1999)Brocess capability with asymmetric tolerances (1994)The Problem of Misplaced Control Limits (1995)Time Series Analysis, Forecasting, and Control (1995)Monitoring Processes That Wander Using Integrated Moving Average Models (1996)CONTINUOUS INSPECTION SCHEMES (1954)Time Series Analysis: Forecasting and Control (1977)Time-Series Modeling for Statistical Process Control (1988)Some Statistical Process Control Methods for Autocorrelated Data (1991)Multivariate SPC Charts for Monitoring Batch Processes (1995)Beyond Accuracy: What Data Quality Means to Data Consumers (1996)Role congruity theory of prejudice toward female leaders. (2002)Transformational, transactional, and laissez-faire leadership styles: A meta-analysis comparing women and men. (2003)A formal method for subjective design evaluation with multiple attributes (1991)SISO run-to-run feedback controller using triple EWMA smoothing for semiconductor manufacturing processes (2002)A study of EWMA chart with transformed exponential data (2006)Algorithmic Statistical Process Control: Concepts and an Application (1992)Exponential smoothing: The state of the art (1985)Using daily stock returns (1985)Generalized autoregressive conditional heteroskedasticity (1986)
this work references cited by second hop

References

  • 1982Out of the Crisis7,278 cited
  • 1977Time Series Analysis: Forecasting and Control6,446 cited
  • 1990Exponentially Weighted Moving Average Control Schemes: Properties and Enhancements1,939 cited
  • 1986The Exponentially Weighted Moving Average1,146 cited
  • 1990Quality Engineering in Production Systems894 cited
  • 1992Statistical Process Monitoring and Feedback Adjustment: A Discussion331 cited
  • 1992[Statistical Process Monitoring and Feedback Adjustment]: Discussion318 cited

Cited by

  • 1997Run-to-Run Process Control: Literature Review and Extensions222 cited
  • 2001Age-based double EWMA controller and its application to CMP processes128 cited
  • 1999SPC Methods for Quality Improvement108 cited
  • 1999Long run and transient analysis of a double EWMA feedback controller83 cited
  • 2002A multivariate double EWMA process adjustment scheme for drifting processes77 cited
  • 1999Integrated design of run-to-run PID controller and SPC monitoring for process disturbance rejection67 cited
  • 2006The worst ill-conditioned silicon wafer slicing machine detected by using grey relational analysis63 cited
  • 1997A self-tuning EWMA controller utilizing artificial neural network function approximation techniques

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62 cited
  • 2013A Literature Review on Sampling Techniques in Semiconductor Manufacturing60 cited
  • 2009A new monitoring design for uni-variate statistical quality control charts57 cited
  • 2001Some Properties of EWMA Feedback Quality Adjustment Schemes for Drifting Disturbances57 cited
  • 2013Overlay Error Compensation Using Advanced Process Control With Dynamically Adjusted Proportional-Integral R2R Controller51 cited
  • 1993Modeling, optimization and control of spatial uniformity in manufacturing processes47 cited
  • 2003A Unifying View of Some Process Adjustment Methods42 cited
  • 2002A study on a multivariate EWMA controller40 cited
  • 1998Combining SPC and EPC in a Hybrid Industry40 cited