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In-line statistical process control and feedback for VLSI integrated circuit manufacturing
1 references·0 citing·2 second hop
In-line statistical process control and feedback for VLSI integrated circuit manufacturing (2003)In-line statistical process control and f…Process optimization tweaking tool (POTT) and its application in controlling oxidation thickness (1989)Process optimization tweaking…In-line statistical process control and feedback for VLSI integrated circuit manufacturing (1990)Quality control of the injection molding process using an EWMA predictor and minimum–variance controller (2009)
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References

  • 1989Process optimization tweaking tool (POTT) and its application in controlling oxidation thickness20 cited

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