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A Review of Statistical Methods for Quality Improvement and Control in Nanotechnology

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References

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2006Parameters optimization of a nano-particle wet milling process using the Taguchi method, response surface method and genetic algorithm208 cited
2005Handbook of Industrial and Systems Engineering115 cited
2005Wavelet-based SPC procedure for complicated functional data99 cited
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2006Statistical process adjustment: a brief retrospective, current status, and some opportunities for further work23 cited

Cited by

2010Online parameter estimation and run-to-run process adjustment using categorical observations13 cited
2020Machine learning–driven in situ process monitoring with vibration frequency spectra for chemical mechanical planarization10 cited
2022On the Odd Perks Exponential Model: An Application to Quality Control Data8 cited

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