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Some Properties of EWMA Feedback Quality Adjustment Schemes for Drifting Disturbances

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References

1973Time Series Analysis Forecasting and Control.972 cited
1995Run by run process control: combining SPC and feedback control325 cited
1998Statistical Control by Monitoring and Feedback Adjustment317 cited
1993Stability and Sensitivity of an EWMA Controller230 cited
1997Run-to-Run Process Control: Literature Review and Extensions222 cited
1999Long run and transient analysis of a double EWMA feedback controller83 cited

Cited by

2003A Unifying View of Some Process Adjustment Methods42 cited
2002SISO run-to-run feedback controller using triple EWMA smoothing for semiconductor manufacturing processes39 cited
2003AN ANALYSIS AND MIMO EXTENSION OF A DOUBLE EWMA RUN-TO-RUN CONTROLLER FOR NON-SQUARED SYSTEMS29 cited
2003Integration of Sequential Process Adjustment and Process Monitoring Techniques24 cited
2006Drift time detection and adjustment procedures for processes subject to linear trend24 cited
2020A New Double Exponentially Weighted Moving Average Run-to-Run Control Using a Disturbance-Accumulating Strategy for Mixed-Product Mode23 cited
2004A time-varying weights tuning method of the double EWMA controller22 cited
2020Run-to-run control of batch production process in manufacturing systems based on online measurement

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16 cited

2016Process control and economic cost design for total quality management15 cited

2017Performance Analysis of Double EWMA Controller Under Dynamic Models With Drift15 cited

2004A neural network-based adaptive algorithm on the single EWMA controller13 cited

2004A Sequential Markov Chain Monte Carlo Approach to Set-up Adjustment of a Process over a Set of Lots11 cited