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Run-to-Run Process Adjustment Using Categorical Observations

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References

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Cited by

2009A Review of Statistical Methods for Quality Improvement and Control in Nanotechnology49 cited
2015QQ Models: Joint Modeling for Quantitative and Qualitative Quality Responses in Manufacturing Systems37 cited
2009A General Harmonic Rule Controller for Run-to-Run Process Control21 cited
2013A batch-based run-to-run process control scheme for semiconductor manufacturing18 cited
2013Process adjustment with an asymmetric quality loss function18 cited
2011A Bayesian framework for online parameter estimation and process adjustment using categorical observations16 cited

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2017Multivariate Ordinal Categorical Process Control Based on Log-Linear Modeling14 cited

2010Online parameter estimation and run-to-run process adjustment using categorical observations13 cited

2009Recursive parameter estimation for categorical process control12 cited

2013A Run-to-Run Profile Control Algorithm for Improving the Flatness of Nano-Scale Products10 cited