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Improved determination of the gas flow rate for UHV and leak metrology with laser refractometry

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References

1992Equation for the Determination of the Density of Moist Air (1981/91)295 cited
1999New, fully automated, primary standard for generating vacuum pressures between 10 10Pa and 3 10 2Pa with respect to residual pressure57 cited
2004Refractometry and gas density55 cited
1993A precision gas flowmeter for vacuum metrology49 cited
1998Refractometer for tracking changes in the refractive index of air near 780 nm41 cited
2002A new fully automated gas flowmeter at the PTB for flow rates between 10-13mol/s and 10-6mol/s37 cited
2002A heterodyne refractometer for air index of refraction and air density measurements34 cited
1988Density of Moist Air Monitored by Laser Refractometry27 cited

Cited by

2020Realization of Quantum Pascal Using Natural Fundamental Physical Constants15 cited
2012Very low gas flow measurements for UHV/XHV and leak calibration15 cited

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