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Reinforcement learning for process control with application in semiconductor manufacturing
7 references·0 citing·24 second hop
Reinforcement learning for process control with application in semiconductor manufacturing (2023)Reinforcement learning for process contro…Deep reinforcement learning algorithm for dynamic pricing of express lanes with multiple access locations (2020)Deep reinforcement learning a…A study of variable ewma controller (2003)A study of variable ewma cont…Age-based double EWMA controller and its application to CMP processes (2001)Age-based double EWMA control…Integrated design of run-to-run PID controller and SPC monitoring for process disturbance rejection (1999)Integrated design of run-to-r…Run-to-Run Process Control: Literature Review and Extensions (1997)Run-to-Run Process Control: L…Run by run process control: combining SPC and feedback control (1995)Run by run process control: c…Stability and Sensitivity of an EWMA Controller (1993)Stability and Sensitivity of …The Exponentially Weighted Moving Average (1986)Exponentially Weighted Moving Average Control Schemes: Properties and Enhancements (1990)Long run and transient analysis of a double EWMA feedback controller (1999)A multivariate double EWMA process adjustment scheme for drifting processes (2002)On the Experimental Attainment of Optimum Conditions (1951)Time Series Analysis: Forecasting and Control (1977)Empirical Model Building and Response Surfaces (1988)Out of the Crisis (1982)SPC Methods for Quality Improvement (1999)Time Series Analysis Forecasting and Control. (1971)Time Series Analysis: Forecasting and Control (1977)Statistical control by monitoring and feedback adjustment (1997)Variable EWMA run-to-run controller for drifted processes (2006)Run-to-Run Process Adjustment Using Categorical Observations (2007)Overlay Error Compensation Using Advanced Process Control With Dynamically Adjusted Proportional-Integral R2R Controller (2013)Introduction to Statistical Quality Control (1992)The dynamic T 2 chart for monitoring feedback-controlled processes (2002)Dynamic Tolling Strategies for Managed Lanes (2009)Optimal dynamic pricing strategies for high-occupancy/toll lanes (2010)Model-Based Dynamic Toll Pricing: An Overview (2021)Optimal coordinated congestion pricing for multiple regions: a surrogate-based approach (2023)Airline dynamic pricing with patient customers using deep exploration-based reinforcement learning (2024)SISO run-to-run feedback controller using triple EWMA smoothing for semiconductor manufacturing processes (2002)A study of EWMA chart with transformed exponential data (2006)
this work references cited by second hop

References

  • 1995Run by run process control: combining SPC and feedback control325 cited
  • 1993Stability and Sensitivity of an EWMA Controller230 cited
  • 1997Run-to-Run Process Control: Literature Review and Extensions222 cited
  • 2001Age-based double EWMA controller and its application to CMP processes128 cited
  • 1999Integrated design of run-to-run PID controller and SPC monitoring for process disturbance rejection67 cited
  • 2003A study of variable ewma controller64 cited
  • 2020Deep reinforcement learning algorithm for dynamic pricing of express lanes with multiple access locations52 cited

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